Micromotive MEMS -> Microassembly: Precision assembly of micro parts

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1004"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td width="640" height="92" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   Microassembly</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="80" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="640" height="80" valign="top" class="Stil8"><p align="justify">Micro assembly is the precise joining of components with accuracies of a few micrometers, as well as, the joining of very small elements. The use of micro systems often requires an interface between the macro world (the user) and the micro system. Many micro components are so small that they can not be used without a suitable interface.</p></td> </tr> </table></td> </tr> <tr> <td height="177" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="410" height="177" valign="top" class="Stil8"><p> </p> <p><strong>Microfabricated plug in system</strong></p> <div align="justify">This plugin system has been implemented for the assembly of two separately fabricated micro components for which an adhesive bond was not suitable. The assembly tolerance is less than 1 µm.</div></td> <td width="20" valign="top"> </td> <td width="214" valign="top"><img src="Grafiken/Fischer.jpg" width="214" height="150"></td> </tr> </table></td> </tr> <tr> <td height="335" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td height="150" colspan="5" valign="top" class="Stil8"><p><strong>Optical probe mounted on the end face of a glass fiber </strong></p> <div align="justify">This example shows the micro assembly of an optical scanning nearfield probe. The actual probe is fabricated at wafer level, in large numbers. The probe is manufactured on a circular membrane. The membrane has two attachment arms with predetermined breaking points spanning over an aperture in the silicon wafer. After the probe is mounted on the end face of a mono mode glass fiber it is detached by breaking the attachment arms. The glass fiber is positioned semi automatically by means of active adjustment. For this purpose, laser light is coupled into the glass fiber, the light emerging from the probe is detected and maximized by lateral positioning of the glass fiber.</div></td> </tr> <tr> <td width="70" height="185" valign="top"> </td> <td width="214" valign="top"><img src="Grafiken/Fibertip.jpg" width="214" height="150"></td> <td width="70" valign="top"> </td> <td width="214" valign="top"><img src="Grafiken/Montage.jpg" width="214" height="150"></td> <td width="72" valign="top"> </td> </tr> </table></td> </tr> <tr> <td height="285" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td height="100" colspan="5" valign="top" class="Stil8"><p><strong>Smallest burr puzzle of the world</strong></p> <p align="justify">The burr puzzle consists of six individual parts assembled in a specific order. The components are microfabricated, prepared using a photoresist with high aspect ratio as mold for metalplating. The length of each part is 600 µm and the cross section is 100 µm x 100 µm. The parts of the burr puzzle are put together by means of micro assembly.</p></td> </tr> <tr> <td width="70" height="185" valign="top"> </td> <td width="214" valign="top"><img src="Grafiken/Knoten.jpg" width="193" height="150"></td> <td width="70" valign="top"> </td> <td width="214" valign="top"> <img src="Grafiken/Teile_Knoten.jpg" width="212" height="150"></td> <td width="72" valign="top"> </td> </tr> </table></td> </tr> <tr> <td height="35"> </td> </tr> </table></td> <td width="30" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1004"> </td> </tr> </table></td> <td width="200"> </td> </tr> <tr> <td height="180"></td> <td> </td> <td></td> <td></td> </tr> </table> </body>