Micromotive MEMS -> Silicon grids, Grids for electron optics

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="724"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td height="70" colspan="5" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="0" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   </b>Silicon grids</font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="0"> <hr size="2" noshade> </td> </tr> </table></td> </tr> <tr> <td height="345" colspan="3" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="420" height="280" valign="top" class="Stil8"><p align="justify">For applications in optics and electron optics, we fabricate very precise silicon grids.</p> <p align="justify">These grids are made of silicon bars with a high aspect ratio, that can span large areas. The high aspect ratio in combination with the high modulus of elasticity of silicon enables the possiblity to realize mechanically very stable grids. We fabricate the grids of monocrystalline silicon. They have no mechanical stress and are very plane therefore. Since the grids are manufactured with the help of etching processes we can produce them without burrs. In addition, we can round convex edge also by further processing, which is important when using the grid in high electric fields.</p> <div align="justify">Further important properties are the chemical resistance and thus the useability for biological and medical applications, as well as high thermal stability.</div></td> </tr> <tr> <td height="65"> </td> </tr> </table></td> <td width="20" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="20" height="345"> </td> </tr> </table></td> <td width="200" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="140" valign="top"><img src="Grafiken/Siliziumgitter%20200.jpg" width="200" height="135"></td> </tr> <tr> <td height="25" valign="top" class="Stil8"><div align="center">silicon grid, bar width 60µm </div></td> </tr> <tr> <td height="155" valign="top"><img src="Grafiken/Silizium%20Gitter.jpg" width="200" height="150"></td> </tr> <tr> <td height="25" valign="top"><div align="center"><span class="Stil8">silicon grid, bar width 5 µm </span></div></td> </tr> </table></td> </tr> <tr> <td width="350" height="294" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="350" height="271" valign="top" class="Stil8"><p align="justify"><strong>Application:</strong></p> <p align="justify">Ideal applications for silicon grids, are ion and electron optics, X-ray optics, UV optics, and biology.</p> <p align="justify">Due to the high mechanical stability of the silicon bars, energy filters can be built with very high transmission. Another important aspect for electron-optical applications is that they are free of burrs.</p> <p align="justify">By an additional coating with X-ray absorbing materials scattered radiation filter can be realized. </p> <div align="justify">In the field of biological applications cell strainers can be realized out of silicon grids for example.</div></td> </tr> <tr> <td height="23"> </td> </tr> </table></td> <td width="20" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="20" height="248"> </td> </tr> </table></td> <td colspan="3" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="270" height="277" valign="top"><p class="Stil9">  Specifications:</p> <ul> <li class="Stil8">Maximum mesh size: 100 mm</li> <li class="Stil8">Minimum bar width: about 1µm</li> <li class="Stil8">Aspect ratio of the bars: up to 15</li> <li class="Stil8">Flatness: 0.3µm / mm</li> <li class="Stil8">Maximum temperature: some 100°C</li> <li class="Stil8">Position tolerance: < 1µm</li> <li class="Stil8">Feature accuracy: ~ 1µm</li> </ul></td> </tr> <tr> <td height="17"></td> </tr> </table></td> </tr> <tr> <td height="15"></td> <td></td> <td width="50"></td> <td></td> <td></td> </tr> </table></td> <td width="230"> </td> </tr> <tr> <td height="100"></td> <td> </td> <td></td> </tr> </table> </body>