Micromotive MEMS -> Planar microstructures: Structures without topography (e.g. for SNOM)

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <body bgcolor="#FFFFFF" text="#000000" leftmargin="0" topmargin="0" marginwidth="0" marginheight="0"> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="894"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td height="92" colspan="3" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   Planar micro structures</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td width="425" height="640" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" height="640" valign="top" class="Stil8"><p>Planar microstructures are structures of different materials, where one material is embedded in another one, in a matter that the materials are flush at the surface and thus no topography is present.</p> <p>Material combinations can be different metals as well as dielectrics, or combinations. Topography free samples can be fabricated as a membrane and when required be mounted on a support.</p> <p> </p> <p><strong>Application:</strong></p> <p>Topography free structures can be used in nano analysis, where the objects to be examined are already smaller than the topography of conventionally fabricated structures. Applications are also possible in microfluidics when structures such as electrodes need a low fluidic resistance.</p> <p> </p> <p class="Stil9">Specifications:</p> <ul> <li class="Stil8">Material: metals and dielectrics</li> <li class="Stil8">Thickness: few nm - a few µm </li> </ul> <p> </p></td> </tr> </table></td> <td width="15" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="15" height="640"> </td> </tr> </table></td> <td width="200" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="150" valign="top"><p class="Stil9"><img src="Grafiken/Planar.jpg" width="200" height="150"></p> </td> </tr> <tr> <td height="30" valign="top" class="Stil8"><div align="center"> <p>Planar sample (SEM) </p> </div></td> </tr> <tr> <td height="200" valign="top"><img src="Grafiken/SNOM%20Probe.jpg" width="200" height="200"></td> </tr> <tr> <td height="30" valign="top" class="Stil8"><div align="center">Planar sample (SNOM) </div></td> </tr> <tr> <td height="200" valign="top"><img src="Grafiken/SNOM%20Probe%20topo.jpg" width="200" height="200"></td> </tr> <tr> <td height="30" valign="top"><div align="center" class="Stil8">Planar sample (AFM) </div></td> </tr> </table></td> </tr> <tr> <td height="162"> </td> <td> </td> <td> </td> </tr> </table></td> <td width="230"> </td> </tr> <tr> <td height="86"></td> <td> </td> <td></td> </tr> </table> </body>