Micromotive MEMS -> Silicon micro fabrication, Silicon micro structures, Deep Reactive Ion etching, Anisotropic etching of Silicon, Isotropic etching of Silicon

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</td> <td width="45" valign="top"> <table width="45" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="45" height="22" align="center" valign="middle" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Contact.php" target="_top" style="text-decoration:none;">Contact</a></span></div></td> </tr> </table> </td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="4" height="22" bgcolor="#CCCCCC"> </td> <td height="22" valign="middle" bgcolor="#CCCCCC"><div align="right" class="Stil2"><a href="Glossar.php" target="_blank" style="text-decoration:none;"><span class="Stil2"> </span>  </a></div></td> </tr> </table> </td> </tr> </table> </td> </tr> </table> </div> <table width="800" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="100" height="20" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="100" height="20" bgcolor="#E6C864"> </td> </tr> </table> </td> <td width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="29" height="50"></td> <td width="642" rowspan="2" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td height="75" colspan="6" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td height="40" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   </b>Silicon micro parts</font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="0"> <hr size="2" noshade> </td> </tr> </table></td> </tr> <tr> <td width="375" height="289" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="375" height="289" valign="top" class="Stil8"><p align="justify">Our experience in the structuring of silicon enables us to implement complex silicon components.</p> <p align="justify">The basic structuring methods are wet chemical etching or plasma dry etching. With these grooves or ridges can be produced, with a vertical, sloping or concave side wall profile. By combination of different processes from one or both sides of the silicon substrate, we can achieve very complex geometries. Even patterning completely through the substrate is possible. By the use of SOI substrates very small thickness tolerances of about 300 nm can be achieved.</p> <div align="justify">By dry-chemical etching designs can be arranged almost freely. By wet chemical etching structures which are orthogonal to each other can be implemented very well.</div></td> </tr> </table></td> <td width="18" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="18" height="289"> </td> </tr> </table></td> <td colspan="3" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="250" height="175" valign="top"><p><img src="Grafiken/Silizium%20freiform.jpg" width="250" height="167"></p></td> </tr> <tr> <td height="114" valign="top"><div align="center"><span class="Stil10">silicon features by DIRE</span></div></td> </tr> </table></td> <td width="1"></td> </tr> <tr> <td height="190" colspan="5" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="157" valign="top"><img src="Grafiken/ASE%201%20Stufig.jpg" width="200" height="150"></td> <td width="20" valign="top"> </td> <td width="200" valign="top"><img src="Grafiken/Isotrop.jpg" width="200" height="150"></td> <td width="20" valign="top"> </td> <td width="200" valign="top"><img src="Grafiken/KOH%20Kante.jpg" width="200" height="150"></td> </tr> <tr> <td height="33" colspan="6" valign="top" class="Stil10"><div align="center">etching possibilities for silicon</div></td> </tr> </table> </td> <td></td> </tr> <tr> <td height="775" colspan="3" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="423" height="194" valign="top" class="Stil8"><p align="justify">By combination with other manufacturing processes, such as the production of membranes, the doping of silicon or metallization, to name a few, we can integrate multiple functions. Mechanical deformations can be transduced into electrical signals, heated areas can be integrated or electrodes can be added.</p> <div align="justify">Specific properties of single crystalline silicon are its resistance to most chemical substances, no distortion under thermal stress and a wide range of thermal application. Due to its high chemical stability silicon is also very well suitable for biological applications.</div></td> </tr> <tr> <td height="20" valign="top"> </td> </tr> <tr> <td height="261" valign="top"><p class="Stil8"><strong>Application:</strong></p> <p align="justify"> <span class="Stil8">Multi-level silicon components can be used for example in electron optics, where they build very accurate electrode structures in combination with electroplated metals (eg gold).</span></p> <p align="justify" class="Stil8">Also optical components can be fabricated from silicon. Precise iris patterned silicon offers the advantage that no interface reflections occur on transmitting areas compared to patterned metallization on glass. Also no absorbing material exists in deep UV applications.</p> <p align="justify" class="Stil8">For biological and medical applications, silicon is well suitable due to its chemical stability.</p> <div align="justify"><span class="Stil8">Hot stamping molds or master therefore can also be made easily with this method.</span></div></td> </tr> <tr> <td height="20" valign="top"> </td> </tr> <tr> <td height="280" valign="top" class="Stil8"><p><strong>Specifications:</strong></p> <p>The final specifications depend on design parameters such as component height, structure size and number of levels. Therefore, only approximate values can be given here.</p> <ul> <li>Aspect ratio for vertical structures: Up to 15</li> <li>Sidewall angle for vertical structures: 90 + - 1°</li> <li>Sidewall angle for sloping structures: typically 54.7°</li> <li>Pattern fidelity at structure depths of about 0-50 µm: <1µm</li> <li>Pattern fidelity at structure depths of 100-1000µm: ca. 2-10µm </li> <li>Feature sizes: from 500 nm</li> <li>Position tolerance within a level: <1µm </li> <li>Position tolerance from level to level: <2µm</li> <li>Flatness: <0,3 µm / mm</li> <li>Component thicknesses: ~1µm – 1 mm</li> <li>Temperature range: up to 1000°C </li> </ul></td> </tr> </table></td> <td width="20" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="20" height="775"> </td> </tr> </table></td> <td colspan="2" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="155" valign="top"><img src="Grafiken/Silizium%20Gitter.jpg" width="200" height="150"></td> </tr> <tr> <td height="25" valign="top" class="Stil10"><div align="center">silicon grid</div></td> </tr> <tr> <td height="138" valign="top"><img src="Grafiken/V-Gruben%20200.jpg" width="200" height="133"></td> </tr> <tr> <td height="25" valign="top" class="Stil10"><div align="center">glass fibre alignment by silicon v-grooves</div></td> </tr> <tr> <td height="155" valign="top"><p class="Stil8"><img src="Grafiken/ASE%202%20Stufig.jpg" width="200" height="150"> </p></td> </tr> <tr> <td height="40" valign="top" class="Stil10"><div align="center">silicon part as precise holder for glass filters</div></td> </tr> <tr> <td height="237" valign="top"> </td> </tr> </table></td> </tr> <tr> <td height="40"></td> <td></td> <td width="31"></td> <td></td> <td width="199"></td> <td></td> </tr> </table></td> <td width="29"> </td> <td width="200" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="50"> </td> </tr> </table></td> </tr> <tr> <td height="487"></td> <td> </td> <td> </td> </tr> <tr> <td height="5"></td> <td></td> <td></td> <td></td> </tr> </table> </body>