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它的主要特点是：
•Automated sequential sputtering 自动顺序溅射两层不同的成膜材料
•Dual sputter head 双溅射镀膜头
•Large format chamber 大腔室（300 mm D x 127 mm H，可选214mmH的高腔室）
•Coat logging facility 镀膜日志功能（记录最后100条执行过的镀膜参数）
•Fully automated touch-screen control 全自动触摸屏控制
•Customer defined coating protocols 用户自定义镀膜方案
•High resolution turbomolecular pumping涡轮分子泵抽真空，高分辨镀膜
•Vacuum shutdown 真空闭锁功能
•Dual channel film thickness monitor module，Q300T D can be fitted with an optional dual film thickness monitor (FTM), which measures the coating thickness on two quartz crystal monitors located within the chamber 双通道膜厚***模块
•A flat, adjustable stage capable of accepting 4” (101.6 mm) wafers is supplied as standard with the Q300T D. This stage has a rotation speed of 14 to 38 rpm.As an accessory a 6”(152.4 mm) wafer stage is available  大样品台
•An optional lockable emergency stop switch is located in a position easily accessible for the operator, on top of the coater, to immediately cut power to the unit. 紧急停止开关